NANOVEA AFMPro Extended Range Profilometer
The NANOVEA AFMPro Extended Range Profilometer integrates Atomic Force Microscopy (AFM), a high-speed optical profiler, and a video microscope into a single, powerful surface metrology platform. Offering supreme 3D surface characterization from the angstrom (Å) scale to the macro scale, the AFMPro allows precise analysis of both micro- and nanostructures—across the widest possible range—without the need for stitching or post-processing algorithms. With its AFM module, this system reaches sub-nanometer resolution, capturing lateral and vertical features down to single angstrom precision, far beyond the capability of optical-only systems. Combined with Chromatic Confocal Optical Profilometry, it offers fast, accurate, and direct height measurements on any material—transparent, opaque, rough, or smooth.
- Atomic Force Microscopy (AFM) Capability — Enables angstrom-level vertical and lateral resolution, far beyond the limits of optical systems.
- Chromatic Confocal Optical Profilometer — High-speed, non-contact measurement up to 200 times faster than conventional scanning without stitching or correction algorithms.
- Open Platform Design — Large 200 x 150 mm motorized XY stages and 150 mm adjustable height clearance accommodate a wide variety of sample shapes and sizes.
- Full Automation Options — Includes macro programming, pattern recognition, and direct integration with databases for automated QC workflows.
- Real-Time, Direct Height Measurements — No data stitching, no reliance on modeling algorithms—ensuring true physical height accuracy across the entire scan range.
- Multi-Tool Integration — Combines AFM, optical profilometry, and video microscopy in a single platform for comprehensive 3D surface characterization.
- Ideal for Complex Geometries — Accurately profiles curved, rough, polished, and irregular surfaces with no limitation on material type.
- QC-Ready Software Suite — Advanced metrology software automates zone selection, analysis, and data reporting for industrial or research applications.
- Nanotechnology Research and Development
- Semiconductor & Microelectronics Surface Analysis
- Biomedical Device Surface Characterization
- Optical Lens and Coating Inspection
- Automotive and Aerospace Surface Profiling
- Thin Film and Coating Thickness Measurement
- Surface Roughness and Texture Control
| STANDARD SENSOR SINGLE POINT | PS1 | PS2 | PS3 | PS4 | PS5 | PS6 |
|---|---|---|---|---|---|---|
| MAX HEIGHT RANGE | 110 μm | 300 μm | 1.1 mm | 3.5 mm | 10 mm | 24 mm |
| WORKING DISTANCE | 3.3 mm | 10.8 mm | 12.2 mm | 16.5 mm | 26.6 mm | 20 mm |
| LATERAL X - Y ACCURACY | 0.8 μm | 1.7 μm | 2.6 μm | 4.6 μm | 11.0 μm | 11.0 μm |
| HEIGHT REPEATABILITY* | 1.9 nm | 5.4 nm | 15.8 nm | 31.6 nm | 117.0 nm | 237.2 nm |
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