PLD-Workstation – Advanced Pulsed Laser Deposition System
Pulsed Laser Deposition (PLD) is a powerful and versatile thin-film deposition technique that enables stoichiometric material transfer from target to substrate. The SURFACE PLD-Workstation is an advanced, all-in-one solution designed for research, prototyping, and development of complex thin films, with a special focus on advanced oxide and superlattice structures.
The system integrates laser, gas supply, vacuum chamber, and automation into a single compact rack. This “plug-and-play” design minimizes installation effort while offering exceptional flexibility, safety, and performance — even for users without prior PLD experience.
Features
- All-in-one frame for fast plug-and-play installation
- Advanced process automation, ideal for superlattice deposition
- Oxygen-resistant substrate heater with advanced temperature measurement up to 1000 °C
- Optional laser substrate heating
- Flexible, advanced target manipulator with cross-contamination shielding
- Vacuum chamber prepared for future upgrades (RHEED, plasma sources, OES, FTIR, etc.)
- SURFACE Fluence Control option for 100% reproducible results
- Fully enclosed laser beam line for safe operation
- Turn-key delivery
Advanced online support via internet
Applications
- Oxide thin films
- Superlattices
- Functional materials
- Prototyping
- Academic and industrial research
- Advanced material development
Specifications
| Parameter | Specification |
|---|---|
| Laser | Coherent COMPexPro 201F or 205F |
| Max pulse energy | 0.7 J |
| Wavelength | 248 nm |
| Laser gases | 20 L premix, 10 L He, built-in gas cabinet |
| Process gases | 2 MFC channels, automated pressure control |
| Substrate heater | 1" or 2", up to 1000 °C (other sizes on request) |
| Substrate rotation | 0–50 rpm |
| Targets | 4 × 2", with rotation & track control |
| Control system | PC-based, integrated TFT monitor |
| IT features | LAN, SURFWARE support |
| Size | ~2200 × 850 × 1600 mm |
| Power supply | 3×400 VAC / 50 Hz or 3×208 VAC / 60 Hz |
| Cooling | Integrated chiller (201F) |
Download
Download data sheet
